Air operated valve: Standard valve for process gas that uses a metal diaphragm. It supports many variations such as 3-way valves and 2-station 3-way valves as well as single unit and integrated types. Manual Valve for process gas: 90° rotation snap action manual valve. Regulator for process gas: Regulator for process gas that uses a metal diaphragm. It helps stabilize…
As gas supply facilities become more compact, it is increasingly important to reduce the footprint of components used. Based on SEMI standards, it is a gas supply system with a width of 1.5 inches and a lower flow path block that connects devices to save space and improve maintainability. Usable with high temperature and large flow rate gas supply.
