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      • LIGHTING AND INDICATION
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      • PRESSURE TRANSMITTER
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Component for Special Gas & Vacuum system

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  • CKD – Process Gas componentCKD – Process Gas component Quick View
    • CKD – Process Gas componentCKD – Process Gas component Quick View
    • CKD – Process Gas component

    • Component for Special Gas & Vacuum system
    • Air operated valve: Standard valve for process gas that uses a metal diaphragm. It supports many variations such as 3-way valves and 2-station 3-way valves as well as single unit and integrated types. Manual Valve for process gas: 90° rotation snap action manual valve. Regulator for process gas: Regulator for process gas that uses a metal diaphragm. It helps stabilize…
  • CKD – Integrated gas supply systemCKD – Integrated gas supply system Quick View
    • CKD – Integrated gas supply systemCKD – Integrated gas supply system Quick View
    • CKD – Integrated gas supply system

    • Component for Special Gas & Vacuum system
    • As gas supply facilities become more compact, it is increasingly important to reduce the footprint of components used. Based on SEMI standards, it is a gas supply system with a width of 1.5 inches and a lower flow path block that connects devices to save space and improve maintainability. Usable with high temperature and large flow rate gas supply.
  • CKD – Vacuum System componentCKD – Vacuum System component Quick View
    • CKD – Vacuum System componentCKD – Vacuum System component Quick View
    • CKD – Vacuum System component

    • Component for Special Gas & Vacuum system
    • Ejector system Vacuum Pump Suction Pads Vacuum Filter
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