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As gas supply facilities become more compact, it is increasingly important to reduce the footprint of components used. Based on SEMI standards, it is a gas supply system with a width of 1.5 inches and a lower flow path block that connects devices to save space and improve maintainability. Usable with high temperature and large flow rate gas supply.
As gas supply facilities become more compact, it is increasingly important to reduce the footprint of components used. Based on SEMI standards, it is a gas supply system with a width of 1.5 inches and a lower flow path block that connects devices to save space and improve maintainability. Usable with high temperature and large flow rate gas supply.
Space Saving
High durability/long service life
Semiconductor manufacturing process (pre-process)
Components for chemical gas supply facilities
N2 purging related products
Compact Design: Designed to be compact, with a width of 1.5 inches, reducing the footprint of gas supply facilities and saving valuable space in semiconductor manufacturing environments.
Lower Flow Path Block: Features a lower flow path block that connects devices, optimizing space utilization and improving maintainability by simplifying the gas supply system's layout and structure.
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