CKD – Electro pneumatic Regulators
Electro pneumatic regulator
High precision electro pneumatic regulator
Digital electro pneumatic regulator
Thin electro pneumatic regulator
Description
Electro pneumatic regulator :
By using it for pilot air control of chemical pilot regulators (PMP Series), high-precision and high-speed response control is realized.
High precision electro pneumatic regulator:
An electro-pneumatic regulator that adopts feedback control by a semiconductor pressure sensor and an electronic control circuit. This electro-pneumatic regulator allows continuous and precise control of air pressure by electrical signals.
Digital electro pneumatic regulator:
A compact, high-function electro-pneumatic regulator featuring easy-to-use functions such as pressure and error display and direct memory functions.
Thin electro pneumatic regulator:
A thin, compact electro-pneumatic regulator with reduced wiring. Ideal for various pressure control and fine speed cylinder control in semiconductor and precise processing fields.
- Space saving
- Stable pressure
- High precision
- High-speed response
- Lightweight
- Temperature stability
Application
- Semiconductor manufacturing process (post-process)
- Special purpose / conveyance