CKD – Integrated gas supply system

As gas supply facilities become more compact, it is increasingly important to reduce the footprint of components used. Based on SEMI standards, it is a gas supply system with a width of 1.5 inches and a lower flow path block that connects devices to save space and improve maintainability. Usable with high temperature and large flow rate gas supply.

Description

As gas supply facilities become more compact, it is increasingly important to reduce the footprint of components used. Based on SEMI standards, it is a gas supply system with a width of 1.5 inches and a lower flow path block that connects devices to save space and improve maintainability. Usable with high temperature and large flow rate gas supply.

  • Space Saving
  • High durability/long service life

Application

  • Semiconductor manufacturing process (pre-process)
  • Components for chemical gas supply facilities
  • N2 purging related products