CKD – Process Gas component
- Air operated valve: Standard valve for process gas that uses a metal diaphragm.
It supports many variations such as 3-way valves and 2-station 3-way valves as well as single unit and integrated types. - Manual Valve for process gas: 90° rotation snap action manual valve.
- Regulator for process gas: Regulator for process gas that uses a metal diaphragm.
It helps stabilize gas pressure and flow rate.
Description
- Air operated valve: Standard valve for process gas that uses a metal diaphragm.
It supports many variations such as 3-way valves and 2-station 3-way valves as well as single unit and integrated types. - Manual Valve for process gas: 90° rotation snap action manual valve.
- Regulator for process gas: Regulator for process gas that uses a metal diaphragm.
It helps stabilize gas pressure and flow rate.
Features
• Components for chemical gas supply facilities
• Components for chemical liquid supply facilities
• Semiconductor manufacturing process (pre-process)
• N2 purging related products.
• Components for chemical gas supply facilities